1Poly-Crystalline Si wafer
2 156*156mm
3 Growth method:DSS
4 Conductivity:P
1) Geometrical product specification
Shape
square
Size
156.0×156.0(±0.5)mm
Straight angle
90±0.3°
Chamfering angle and size
Bevel edge
0.7--2.1 mm
Right-angle edge
0.5—1.5 mm
Chamfering angle
45±10°
Thickness
TWP-156-200
200.0±20 μm
Center thickness
TWP-156-180 180.0±15 μm
Center thickness
Total thickness variation (TTV)
≤30 μm
Measured on 5-point method or 3-line method
2) Wafer surface condition
Edge damage
length≤1 mm,depth≤0.5 mm,number≤2
Edge crack
No
Saw marks
depth≤15 μm
Crack , Pin Holes
No obvious defects
No. of crystals per cm2
≤20
Stains
number≤3 (under light intensity of300-500 lux),
total area ≤3 cm2
Warp
≤50 μm
3) Electrical Parameters
Resistivity
1.0~3.0 Ω·cm
Resistivity inhomogeneity
≤25%
Effective Minority carrier Life
≥1.2 μs
4) Chemical Parameters
Growth Method
DSS
Conductivity type / Dopant Material
p-type/Boron
Oxygen Concentration
≤8×1017 atoms/ cm2
Carbon Concentration
≤1×1018 atoms/ cm2
Metallic Contamination
≤0.05 ppmw
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